Energy-dispersive X-ray spectroscopy 

Energy-dispersive X-ray spectroscopy is an analytical technique used on a SEM to determine elements at areas of interest. There are several commonly used phrases or abbreviations which are used to characterize this type of analysis. EDS, EDX, XEDS, EDXA, and EDXMA are common abbreviations which uses the same system. Each element on the periodic table has unique identification peak(s) which identify what element(s) are being detected. This type of testing requires an excitation and acquisition of the energy. Excitation is from the filament, which also produces the image. The acquisition of the spectrum is on detector. CMS is equipped with a Silicon Drift Detector (SDD) from IXRF, which is capable of detection of light elements down to Beryllium (Be).