XRF on the SEM

Colorado Metallurgical Services is proud to now offer XRF on the SEM. With the addition of the XRF tube on the SEM we are gaining sensitivity and quantitative analysis on acquired spectrums. The x-ray tube is used either as a standalone or combine with the EDS for light elements.

 

 

 

The periodic chart below shows the sensitivity for different element.

The black highlighted elements are only detectable at low kV produced by from the EDS.

 Light sky blue highlighted element (Mg, Al, Si) can be acquired by both EDS and XRF with <500ppm sensitivity.

Light gray highlighted elements can be acquired by both EDS and XRF with <200ppm sensitivity.

Dark gray highlighted element can be acquired by both EDS and XRF with <50ppm sensitivity.

Dark blue highlighted elements can be acquired by both EDS and XRF with <20ppm sensitivity.

Red highlighted elements can be acquired by both EDS and XRF with <10ppm sensitivity.

Light blue highlighted element can be acquired by both EDS and XRF with <5ppm sensitivity.

Elements not detected by either EDS or XRF are Helium, Hydrogen and lithium.